Nitrogen Trifluoride

Nitrogen trifluoride

1. Product introduction

Nitrosine trifluoride (NF₃) is a colorless, odorless and stable gas at room temperature. It is a strong oxidizing agent. Nitrogen trifluoride in the microelectronics industry as a kind of excellent plasma etching gas, cracking for active fluorine ions in ion etching, the fluorine ion of tungsten and silicon compounds, high purity nitrogen trifluoride excellent etching rate and selectivity to silicon and silicon oxide, it at the time of etching, the etched surfaces without leaving any residue, is a very good cleaning agent, At the same time, it has been widely used in chip manufacturing and high energy lasers.

2. Product Parameters (Specifications)

Nitrogen trifluoride, formula NF₃. Molecular weight of gas: 71.01, melting point: -- 206.8℃(1ATM), boiling point: -- 129℃(1ATM), critical temperature: -- 39.3℃, critical pressure: 44.02 ATM (4.46MPa), liquid density: 1554 kg/m³ (1ATM, boiling point), gas density: 2.95 kg/m (1ATM,21℃), water solubility (1ATM, 22℃) : 1.43×10-5 equivalent concentration. Pure NF3 gas is a colorless and odorless gas. When mixed with a certain amount of impurities, it turns yellow and has moldy or pungent smell. NF3 gas is not flammable, but it can aid combustion. When the temperature exceeds 350℃, nitrogen trifluoride slowly decomposes, producing highly oxidizing fluorine. Therefore, it is a strong oxidant at high temperatures. CAS Number: 7783-54-2. Danger category: class 2.3 toxic gas, the highest allowable content in the air is 29mg/m

3. Product features and uses

Nitrogen trifluoride is mainly used as the fluorine source OF hydrogen fluoride gas high energy chemical laser, the effective part OF the reaction energy between H2-O2 and F2 (about 25%) can be released by laser radiation, so the HF-OF laser is the most promising laser in the chemical laser. Nitrogen trifluoride is an excellent plasma etching gas in the microelectronics industry. For silicon and silicon nitride etching, nitrogen trifluoride has higher etching rate and selectivity than tetrafluoron and tetrafluoron and oxygen mixture gas, and has no pollution to the surface, especially in the etching of integrated circuit materials with thickness less than 1.5um. Nitrogen trifluoride has excellent etching rate and selectivity, leaving no residue on the etched surface, and is also a very good cleaning agent. With the development of nanotechnology and the large-scale development of technology in the electronics industry, its demand will increase day by day.

4. Product details

Nitrogen trifluoride is mainly used as the fluorine source OF hydrogen fluoride gas high energy chemical laser, the effective part OF the reaction energy between H2-O2 and F2 (about 25%) can be released by laser radiation, so the HF-OF laser is the most promising laser in the chemical laser. Nitrogen trifluoride is an excellent plasma etching gas in the microelectronics industry. For silicon and silicon nitride etching, nitrogen trifluoride has higher etching rate and selectivity than tetrafluoron and tetrafluoron and oxygen mixture gas, and has no pollution to the surface, especially in the etching of integrated circuit materials with thickness less than 1.5um. Nitrogen trifluoride has excellent etching rate and selectivity, leaving no residue on the etched surface, and is also a very good cleaning agent. With the development of nanotechnology and the large-scale development of technology in the electronics industry, its demand will increase day by day.

5. Delivery, transportation and services

Dangerous Goods Number: 23016 UN Number: 2451

Packaging category: Z01

Transportation matters needing attention: railway transportation should be reported to railway bureau for trial transportation, and the trial transportation period is two years. After trial run, write trial run report and report to mor for official announcement of transport conditions. The safety helmet on the cylinder must be worn when using the rigid cylinder for transportation. The cylinder is generally flat, and the bottle mouth should be in the same direction, not cross; The height shall not exceed the guardrail board of the vehicle, and the triangular wooden pad is clamped to prevent rolling. It is strictly prohibited to mix and transport with combustible or combustible, reducing agent, edible chemicals and so on. Summer should be transported in the morning and evening to prevent sun exposure. Road transportation should follow the prescribed route, and stop in residential and densely populated areas is prohibited. Slip away should be forbidden in railway transportation.

6.FAQ

1.How many production lines in your factory?

Our company has two production lines.

2. How long is your delivery time?

Around 7 days to 15 days